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Optical Engineering

Total integrated scatter from surfaces with arbitrary roughness, correlation widths, and incident angles
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Paper Abstract

Surface scatter effects from residual optical fabrication errors can severely degrade optical performance. The total integrated scatter (TIS) from a given mirror surface is determined by the ratio of the spatial frequency band-limited "relevant" root-mean-square surface roughness to the wavelength of light. For short-wavelength (extreme-ultraviolet/x-ray) applications, even state-of-the-art optical surfaces can scatter a significant fraction of the total reflected light. In this paper we first discuss how to calculate the band-limited relevant roughness from surface metrology data, then present parametric plots of the TIS for optical surfaces with arbitrary roughness, surface correlation widths, and incident angles. Surfaces with both Gaussian and ABC or K-correlation power spectral density functions have been modeled. These parametric TIS predictions provide insight that is useful in determining realistic optical fabrication tolerances necessary to satisfy specific optical performance requirements.

Paper Details

Date Published: 6 February 2012
PDF: 12 pages
Opt. Eng. 51(1) 013402 doi: 10.1117/1.OE.51.1.013402
Published in: Optical Engineering Volume 51, Issue 1
Show Author Affiliations
James E. Harvey, CREOL, The College of Optics and Photonics, Univ. of Central Florida (United States)
Narak Choi, CREOL, The College of Optics and Photonics, Univ. of Central Florida (United States)
Sven Schroeder, Fraunhofer-Institut für Angewandte Optik und Feinmechanik (Germany)
Angela Duparré, Fraunhofer-Institut für Angewandte Optik und Feinmechanik (Germany)


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