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Journal of Nanophotonics

Tunable stoichiometry of SiOx-BaTiOy-BOz fabricated by multitarget pulsed laser deposition
Author(s): John G. Jones; Jonathan T. Goldstein; Steven R. Smith; Lirong Sun; Gerald R. Landis; Lawrence Grazulis; Neil R. Murphy; Gregory Kozlowski; Rachel Jakubiak; Charles Ed Stutz
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Paper Abstract

Oxide materials of desired stoichiometry are challenging to make in small quantities. Nanostructured thin films of multiple oxide materials were obtained by using pulsed laser deposition and multiple independent targets consisting of Si, BaTiO3, and B. Programmable stoichiometry of nanostructured thin films was achieved by synchronizing a 248-nm krypton fluoride excimer laser at an energy of 300  mJ/pulse, a galvanometer mirror system, and the three independent target materials with a background pressure of oxygen. Island growth occurred on a per pulse basis; some 500 pulses are required to deposit 1 nm of material. The number of pulses on each target was programmed with a high degree of precision. Trends in material properties were systematically identified by varying the stoichiometry of multiple nanostructured thin films and comparing the resulting properties measured using in situ spectroscopic ellipsometry, capacitance measurements including relative permittivity and loss, and energy dispersive spectroscopy (EDS). Films were deposited ∼150 to 907 nm thickness, and in situ ellipsometry data were modeled to calculate thickness n and k. A representative atomic force microscopy measurement was also collected. EDS, ellipsometry, and capacitance measurements were all performed on each of the samples, with one sample having a calculated permittivity greater than 20,000 at 1 kHz.

Paper Details

Date Published: 5 August 2015
PDF: 14 pages
J. Nanophoton. 9(1) 093590 doi: 10.1117/1.JNP.9.093590
Published in: Journal of Nanophotonics Volume 9, Issue 1
Show Author Affiliations
John G. Jones, Air Force Research Lab. (United States)
Jonathan T. Goldstein, Air Force Research Lab. (United States)
Steven R. Smith, Univ. of Dayton Research Institute (United States)
Lirong Sun, General Dynamics Information Technology (United States)
Gerald R. Landis, Univ. of Dayton Research Institute (United States)
Lawrence Grazulis, Univ. of Dayton Research Institute (United States)
Neil R. Murphy, Air Force Research Lab. (United States)
Gregory Kozlowski, Wright State Univ. (United States)
Rachel Jakubiak, Air Force Research Lab. (United States)
Charles Ed Stutz, Air Force Research Lab. (United States)


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