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Journal of Nanophotonics

Characterization of polycrystalline silicon-based photonic crystal-suspended membrane for high temperature applications
Author(s): Chong Pei Ho; Prakash Pitchappa; Piotr Kropelnicki; Jian Wang; Hong Cai; Yuandong Gu; Chengkuo Lee
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Paper Abstract

We present the design and the characterization of a polycrystalline silicon (Si)-based photonic crystal (PhC)-suspended membrane, working in the mid-infrared wavelengths. In order to facilitate transmission measurement, the PhC membrane is released by removing the underneath Si substrateWe present the design and the characterization of a polycrystalline silicon (Si)-based photonic crystal (PhC)-suspended membrane, working in the mid-infrared wavelengths. In order to facilitate transmission measurement, the PhC membrane is released by removing the underneath Si substrate. Around 97% reflection and 3% transmission at 3.58-μm wavelength are measured at room temperature. Characterization is also done at 450°C and it reveals that the peak reflection of the PhC membrane shifts by 75 nm to higher wavelengths. This corresponds to a linear wavelength shift of 0.174  nm/°C and the thermo-optic coefficient is calculated to be +1.70×10−4  K−1. By altering the dimension of the PhC air holes, it is also shown that such a thermo-optic effect is compensated.

Paper Details

Date Published: 15 July 2014
PDF: 8 pages
J. Nanophoton. 8(1) 084096 doi: 10.1117/1.JNP.8.084096
Published in: Journal of Nanophotonics Volume 8, Issue 1
Show Author Affiliations
Chong Pei Ho, National Univ. of Singapore (Singapore)
Institute of Microelectronics (Singapore)
Prakash Pitchappa, National Univ. of Singapore (Singapore)
Institute of Microelectronics (Singapore)
Piotr Kropelnicki, A*STAR Institute of Microelectronics (Singapore)
Jian Wang, A*STAR Institute of Microelectronics (Singapore)
Hong Cai, A*STAR Institute of Microelectronics (Singapore)
Yuandong Gu, Institute of Microelectronics (Singapore)
Chengkuo Lee, National Univ. of Singapore (Singapore)


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