Share Email Print

Journal of Nanophotonics • Open Access

Pulsed laser deposition of Al-doped ZnO films on glass and polycarbonate
Author(s): Kwan Chu Tan; Yen Sian Lee; Seong Ling Yap; Soon Yie Kok; Chen Hon Nee; Wee Ong Siew; Teck Yong Tou; Seong Shan Yap

Paper Abstract

Al-doped ZnO (AZO) films were deposited on glass and polycarbonate (PC) at room temperature by using pulsed Nd:YAG laser at 355 nm. AZO thin films were obtained for both substrates at laser fluences from 2 to 5  J/cm2 in O2 partial pressure of 2.1 Pa. The effects of laser fluence on the structural, electrical, and optical properties of the films were investigated. The films with lowest resistivity and highest transmittance have been obtained at 2  J/cm2. The resistivities were 2.29×10−3  Ωcm for AZO on glass and 1.49×10−3  Ωcm for AZO on PC. With increasing laser fluence, the deposited films have lower crystallinity, higher resistivity, and smaller optical bandgap.

Paper Details

Date Published: 10 October 2014
PDF: 8 pages
J. Nanophoton. 8(1) 084091 doi: 10.1117/1.JNP.8.084091
Published in: Journal of Nanophotonics Volume 8, Issue 1
Show Author Affiliations
Kwan Chu Tan, Multimedia Univ. (Malaysia)
Yen Sian Lee, Univ. of Malaya (Malaysia)
Seong Ling Yap, Univ. of Malaya (Malaysia)
Soon Yie Kok, Multimedia Univ. (Malaysia)
Chen Hon Nee, Multimedia Univ. (Malaysia)
Wee Ong Siew, Multimedia Univ. (Malaysia)
Teck Yong Tou, Multimedia Univ. (Malaysia)
Seong Shan Yap, Univ. of Malaya (Malaysia)

© SPIE. Terms of Use
Back to Top