Share Email Print

Journal of Nanophotonics • Open Access

Practical applications of thin films nanostructured by shadowing growth
Author(s): Motofumi Suzuki

Paper Abstract

Even prior to the recent advent of advanced top-down processes, shadowing growth by oblique angle deposition (OAD) has long been providing self-assembled nanostructures over much larger areas for much lower costs. In the past two decades, significant progress has been made in the development of well-controlled three-dimensional nanomorphologies such as zigzags and helixes. Much effort has been put into theoretical and numerical understanding of the growth mechanism to improve morphology. Many researchers in academia have been investigating useful properties of nanocolumnar thin films in their laboratories. However, most companies seem hesitant to introduce OAD techniques into the factory, owing to the prejudice that the OAD thin films are neither durable nor reproducible. The progress in OAD technology for practical applications is reviewed and discussed.

Paper Details

Date Published: 11 March 2013
PDF: 11 pages
J. Nanophoton. 7(1) 073598 doi: 10.1117/1.JNP.7.073598
Published in: Journal of Nanophotonics Volume 7, Issue 1
Show Author Affiliations
Motofumi Suzuki, Kyoto Univ. (Japan)

© SPIE. Terms of Use
Back to Top