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Journal of Nanophotonics

Sensing performance of plasma-enhanced chemical vapor deposition SiC-SiO2-SiC horizontal slot waveguides
Author(s): Gregory Pandraud; Eduardo Margallo-Balbas; Pasqualina M. Sarro
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Paper Abstract

We have studied, for the first time, the sensing capabilities of plasma-enhanced chemical vapor deposition (PECVD) SiC-SiO2-SiC horizontal slot waveguides. Optical propagation losses were measured to be 23.9  dB/cm for the quasi-transverse magnetic mode. To assess the potential of this device as a sensor, we simulated the confinement factor in the slot. This simulation revealed that SiC-based slot waveguides can be used, advantangeously, for sensing as the confinement strongly varies with the refractive index of the slot material. A confinement factor change of 0.15/refractive index units was measured for different slot materials.

Paper Details

Date Published: 22 November 2012
PDF: 8 pages
J. Nanophoton. 6(1) 063530 doi: 10.1117/1.JNP.6.063530
Published in: Journal of Nanophotonics Volume 6, Issue 1
Show Author Affiliations
Gregory Pandraud, Technische Univ. Delft (Netherlands)
Eduardo Margallo-Balbas, MedLumics S.L. (Spain)
Pasqualina M. Sarro, Technische Univ. Delft (Netherlands)


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