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Journal of Nanophotonics

Nanomechanically suspended low-loss silicon nanowire waveguide as in-plane displacement sensor
Author(s): Xiongyeu Chew; Guangya Zhou; Fook Siong Chau
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Paper Abstract

We have devised an air-suspended nano-optomechanical structure that is capable of precisely detecting in-plane motion up to a precision of subnanometer level. To achieve the detection, we utilized a basic silicon photonic building block (i.e., a nanowire waveguide directional coupler) in conjunction with nanoelectromechanical systems (NEMS). We numerically optimized the design and experimentally demonstrated a displacement sensitivity of 8.83×10−5  V/nm−1 with a low noise-level resolution of 0.172  nm/√Hz in a 1 Hz bandwidth centered at 950 Hz. As the waveguide coupler design does not segmentize nanowire waveguides, we eliminated the undesirable insertion losses and coupling losses irrelevant to the measurand. Furthermore the design is simple, ultracompact, and can be easily integrated with on-chip photonic systems, which may be beneficial for applications that require a compact displacement sensor with high accuracy and precision.

Paper Details

Date Published: 29 March 2012
PDF: 11 pages
J. Nanophoton. 6(1) 063505 doi: 10.1117/1.JNP.6.063505
Published in: Journal of Nanophotonics Volume 6, Issue 1
Show Author Affiliations
Xiongyeu Chew, National Univ. of Singapore (Singapore)
Guangya Zhou, National Univ. of Singapore (Singapore)
Fook Siong Chau, National Univ. of Singapore (Singapore)


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