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Journal of Nanophotonics

Direct deposition of semitransparent conducting pyrolytic carbon films
Author(s): Tommi Kaplas; Yuri P. Svirko
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Paper Abstract

Ultrathin pyrolytic carbon films were synthesized in a single step on dielectric substrates, using a methane-based chemical vapor deposition technique. The developed technique enables the production of wafer scale transparent conductive films suitable for applications in optics and optoelectronics.

Paper Details

Date Published: 5 October 2012
PDF: 7 pages
J. Nanophoton. 6(1) 061703 doi: 10.1117/1.JNP.6.061703
Published in: Journal of Nanophotonics Volume 6, Issue 1
Show Author Affiliations
Tommi Kaplas, Univ. of Eastern Finland (Finland)
Yuri P. Svirko, Univ. of Eastern Finland (Finland)

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