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Journal of Nanophotonics

Designing a scanning probe microscope for in situ study of carbon materials growth processes during chemical vapor deposition
Author(s): Artem Borisovich Loginov; Rinat Ramilovich Ismagilov
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Paper Abstract

The development of methods for in situ analysis is required to provide deeper understanding of carbon film materials formation during chemical vapor deposition (CVD). Here, we describe scanning probe microscope instrument designed for study of nucleation and growth of thin film materials obtained by carbon condensation from a hydrogen/methane gas mixture activated by the “hot filament” method. The microscope allows measurements of topology characteristics, width of band gap, Fermi level position, and electrical conductivity of the carbon film material during its formation in the CVD process. We present the design and the characteristics of the microscope in this paper.

Paper Details

Date Published: 10 February 2017
PDF: 7 pages
J. Nanophoton. 11(3) 032509 doi: 10.1117/1.JNP.11.032509
Published in: Journal of Nanophotonics Volume 11, Issue 3
Show Author Affiliations
Artem Borisovich Loginov, M.V. Lomonosov Moscow SU (Russian Federation)
Rinat Ramilovich Ismagilov, M.V. Lomonosov Moscow SU (Russian Federation)

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