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Journal of Nanophotonics

Fluid modeling for plasma-enhanced direct current chemical vapor deposition
Author(s): Rinat R. Ismagilov; Ildar R. Khamidullin; Victor I. Kleshch; Sergei A. Malykhin; Andrey M. Alexeev; Alexander N. Obraztsov
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Paper Abstract

A self-consistent continuum (fluid) model for a direct current discharge used in a chemical vapor deposition system is developed. The model is built for a two-dimensional axisymmetric system and incorporates an electron energy balance for low-pressure Ar gas. The underlying physics of the fluid model is briefly discussed. The fluid and Poisson equations for plasma species are used as the model background. The plasma species considered in the model include electrons, Ar+ ions, and Ar atoms in ground and excited states. Nine reactions between these species are taken into account, including surface reactions. The densities of various plasma species as well as the relative contributions of generation and annihilation processes for electrons, ions, and atoms are calculated. The concentrations for electrons and Ar+ ions on the order of 1020  m3 are obtained for the plasma in the computer simulations.

Paper Details

Date Published: 28 September 2015
PDF: 12 pages
J. Nanophoton. 10(1) 012503 doi: 10.1117/1.JNP.10.012503
Published in: Journal of Nanophotonics Volume 10, Issue 1
Show Author Affiliations
Rinat R. Ismagilov, Lomonosov Moscow State Univ. (Russian Federation)
A. M. Prokhorov General Physics Institute of the Russian Academy of Sciences (Russian Federation)
Ildar R. Khamidullin, Bashkir State Univ. (Russian Federation)
Victor I. Kleshch, Lomonosov Moscow State Univ. (Russian Federation)
A. M. Prokhorov General Physics Institute of the Russian Academy of Sciences (Russian Federation)
Sergei A. Malykhin, Lomonosov Moscow State Univ. (Russian Federation)
A. M. Prokhorov General Physics Institute of the Russian Academy of Sciences (Russian Federation)
Andrey M. Alexeev, Lomonosov Moscow State Univ. (Russian Federation)
A. M. Prokhorov General Physics Institute of the Russian Academy of Sciences (Russian Federation)
Alexander N. Obraztsov, Lomonosov Moscow State Univ. (Russian Federation)
A. M. Prokhorov General Physics Institute of the Russian Academy of Sciences (Russian Federation)
Univ. of Eastern Finland (Finland)


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