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Journal of Micro/Nanolithography, MEMS, and MOEMS

Investigation, modeling, and experiment of an MEMS S-springs vibrating ring gyroscope
Author(s): Zhiwei Kou; Jun Liu; Huiliang Cao; Ziqi Han; Yanan Sun; Yunbo Shi; Senxin Ren; Yingjie Zhang
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Paper Abstract

This study presents a microelectromechanical systems S-springs vibration ring gyroscope (MSVRG), which is driven by electrostatic force and detected by capacitance. First, a ring resonator structure with eight S-shaped symmetrical supporting springs is developed, and the capacitor electrodes are designed according to the vibration characteristics of the ring resonator. Then, a precise equivalent stiffness model of MSVRG is established based on the vibration mechanics and the Cassette theorem, which can be employed for any other ring gyroscope with differently shaped springs. Moreover, the mode resonant frequency error of between experiments, finite-element analysis (FEA) and theory calculation, is 10.54% and 3.76%, respectively. After that, the process of MSVRG structure is introduced and the structure is manufactured, and the theory calculation and FEA value with processed parameters have 1.19% and 4.59% difference with resonant frequency tested value, respectively. Finally, the static performance of the fabricated MSVRG is tested, and the bias instability is about 0.0119    deg / s and angle random walk is about 0.0359    deg / s 1 / 2 at room temperature.

Paper Details

Date Published: 16 January 2018
PDF: 10 pages
J. Micro/Nanolith. MEMS MOEMS 17(1) 015001 doi: 10.1117/1.JMM.17.1.015001
Published in: Journal of Micro/Nanolithography, MEMS, and MOEMS Volume 17, Issue 1
Show Author Affiliations
Zhiwei Kou, North Univ. of China (China)
Inner Mongolia Univ. of Technology (China)
Jun Liu, North Univ. of China (China)
Huiliang Cao, North Univ. of China (China)
Ziqi Han, North Univ. of China (China)
Yanan Sun, North Univ. of China (China)
Yunbo Shi, North Univ. of China (China)
Senxin Ren, North Univ. of China (China)
Yingjie Zhang, North Univ. of China (China)


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