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### Journal of Micro/Nanolithography, MEMS, and MOEMS • Open Access

Fabrication and analysis of metallic nanoslit structures: advancements in the nanomasking method

Paper Abstract

This work advances the fabrication capabilities of a two-step lithography technique known as nanomasking for patterning metallic nanoslit (nanogap) structures with sub-10-nm resolution, below the limit of the lithography tools used during the process. Control over structure and slit geometry is a key component of the reported method, exhibiting the control of lithographic methods while adding the potential for mass-production scale patterning speed during the secondary step of the process. The unique process allows for fabrication of interesting geometric combinations such as dual-width gratings that are otherwise difficult to create with the nanoscale resolution required for applications, such as nanoscale optics (plasmonics) and electronics. The method is advanced by introducing a bimetallic fabrication design concept and by demonstrating blanket nanomasking. Here, the need for the secondary lithography step is eliminated improving the mass-production capabilities of the technique. Analysis of the gap width and edge roughness is reported, with the average slit width measured at $7.4 ± 2.2 nm$ . It was found that while no long-range correlation exists between the roughness of either gap edge, and there are ranges in the order of tens of nanometers over which the slit edge roughness is correlated or anticorrelated across the gap. This work helps quantify the nanomasking process, which aids in future fabrications and leads toward the development of more accurate computational models for the optical and electrical properties of fabricated devices.

Paper Details

Date Published: 2 January 2018
PDF: 7 pages
J. Micro/Nanolith. MEMS MOEMS 17(1) 013501 doi: 10.1117/1.JMM.17.1.013501
Published in: Journal of Micro/Nanolithography, MEMS, and MOEMS Volume 17, Issue 1
Show Author Affiliations
Stephen J. Bauman, Univ. of Arkansas (United States)
Ahmad A. Darweesh, Univ. of Arkansas (United States)
Desalegn T. Debu, Univ. of Arkansas (United States)
Joseph B. Herzog, Univ. of Arkansas (United States)