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Journal of Micro/Nanolithography, MEMS, and MOEMS • Open Access

kW-class picosecond thin-disc prepulse laser Perla for efficient EUV generation
Author(s): Akira Endo; Martin Smrž; Jiří Mužík; Ondřej Novák; Michal Chyla; Tomáš Mocek

Paper Abstract

The technology for extreme ultraviolet (EUV) lithography sources is maturing. Laser produced plasma (LPP) sources with usable power > 100    W have been used in high-volume manufacturing (HVM) applications, and 250-W sources are expected to be introduced in HVM soon. However, a further increase of power and cleanness may benefit a powerful picosecond (ps) laser in the near-infrared and wavelength converted spectral region. The HiLASE Centre has been working in thin-disc laser technology and has demonstrated a 0.5-kW platform Perla-C based on a very compact Yb:YAG regenerative amplifier. 100-kHz ps operation has been achieved with a fundamental spatial mode and excellent long-term pointing and energy stability. It is reported on a thin-disc-based ps Yb:YAG solid-state laser technology platform Perla developed in the Czech Republic and the present performance of delivering > 4    mJ , < 2 - ps pulses at a 100-kHz repetition rate with the potential to be upgraded to 1 kW of average power and 1-MHz pulse repetition rate. The ps laser extendibility is important for kW-class LPP sources and controlled free electron laser EUV sources in 10-kW power region.

Paper Details

Date Published: 24 November 2017
PDF: 6 pages
J. Micro/Nanolith. MEMS MOEMS 16(4) 041011 doi: 10.1117/1.JMM.16.4.041011
Published in: Journal of Micro/Nanolithography, MEMS, and MOEMS Volume 16, Issue 4
Show Author Affiliations
Akira Endo, HiLASE Ctr., Institute of Physics of the ASCR (Czech Republic)
Martin Smrž, HiLASE Ctr., Institute of Physics of the ASCR (Czech Republic)
Jiří Mužík, HiLASE Ctr., Institute of Physics of the ASCR (Czech Republic)
Czech Technical Univ. in Prague (Czech Republic)
Ondřej Novák, HiLASE Ctr., Institute of Physics of the ASCR (Czech Republic)
Michal Chyla, HiLASE Ctr., Institute of Physics of the ASCR (Czech Republic)
Tomáš Mocek, HiLASE Ctr., Institute of Physics of the ASCR (Czech Republic)


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