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Journal of Micro/Nanolithography, MEMS, and MOEMS • new

Doubling the spatial resolution in capacitive tactile sensors
Author(s): Mochtar Chandra; Shi-Yu Ke; Rongshun Chen; Cheng-Yao Lo
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Paper Abstract

A capacitive tactile sensor comprising two capacitors was developed to enhance detection by more than doubling the spatial resolution. This arrangement reduced the number of required capacitors from four to two and reconfigured the capacitor shape from square to rectangular, resulting in a symmetric spatial resolution in the x- and y-directions. The theoretical evaluations, simulation predictions, device fabrication, and data analysis conducted in this study yielded identical results. In addition, angle detection errors resulting from fabrication and material uncertainties were comprehensively examined for the first time. The evaluations performed regarding the capacitor configuration further indicated that the sensitivity of shear force detection in this study was optimized with the requirement of a symmetric design.

Paper Details

Date Published: 20 July 2017
PDF: 9 pages
J. Micro/Nanolith. 16(3) 035001 doi: 10.1117/1.JMM.16.3.035001
Published in: Journal of Micro/Nanolithography, MEMS, and MOEMS Volume 16, Issue 3
Show Author Affiliations
Mochtar Chandra, National Tsing Hua Univ. (Taiwan)
Shi-Yu Ke, National Tsing Hua Univ. (Taiwan)
Rongshun Chen, National Tsing Hua Univ. (Taiwan)
Cheng-Yao Lo, National Tsing Hua Univ. (Taiwan)


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