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Journal of Micro/Nanolithography, MEMS, and MOEMS

Nanofabrication and characterization of high-line-density x-ray transmission gratings
Author(s): Xiaoli Zhu; Hailiang Li; Leifeng Cao; Shenye Liu; Peixiong Shi; Changqing Xie
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Paper Abstract

We report the nanofabrication and characterization of x-ray transmission gratings with a high aspect ratio and a feature size of down to 65 nm. Two nanofabrication methods, the combination of electron beam and optical lithography and the combination of electron beam, x-ray, and optical lithography, are presented in detail. In the former approach, the proximity effect of electron beam lithography based on a thin membrane of low material was investigated, and the x-ray transmission gratings with a line density of up to 6666  lines/mm were demonstrated. In the latter approach, which is suitable for low volume production, we investigated the x-ray mask pattern correction during the electron beam lithography process and the diffraction effect between the mask and wafer during the x-ray lithography process, and we demonstrated the precise control ability of line width and vertical side-wall profile. A large number of x-ray transmission gratings with a line density of 5000  lines/mm and Au absorber thickness of up to 580 nm were fabricated. The optical characterization results of the fabricated x-ray transmission gratings were given, suggesting that these two reliable approaches also promote the development of x-ray diffractive optical elements.

Paper Details

Date Published: 19 August 2017
PDF: 9 pages
J. Micro/Nanolith. MEMS MOEMS 16(3) 034503 doi: 10.1117/1.JMM.16.3.034503
Published in: Journal of Micro/Nanolithography, MEMS, and MOEMS Volume 16, Issue 3
Show Author Affiliations
Xiaoli Zhu, Institute of Microelectronics (China)
Hailiang Li, Institute of Microelectronics (China)
Leifeng Cao, China Academy of Engineering Physics (China)
Shenye Liu, China Academy of Engineering Physics (China)
Peixiong Shi, Technical Univ. of Denmark (Denmark)
Changqing Xie, Institute of Microelectronics (China)


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