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Journal of Micro/Nanolithography, MEMS, and MOEMS • new

Theoretical and experimental study of the photoelastic effect in channel waveguides in a diaphragm of LiNbO3
Author(s): Maryam Ali Akbar Ganji; Reza Asadi
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Paper Abstract

The ability of the photoelastic effect in optical waveguides fabricated by Ti diffusion in a diaphragm of LiNbO 3 for using as a pressure sensor has been investigated. We have studied the polarization rotation and phase difference between TE and TM polarizations for the light transmitted from the waveguide that are induced by the external pressure. We have also studied the effect of position of the waveguides in the diaphragm on the pressure sensor’s sensitivity. The polishing technique has been used to reduce the thickness of the diaphragm to 0.2 mm in order to increase the sensor’s sensitivity to about P π = 170    kPa , which is equivalent to the pressure required for inducing phase difference of π rad between the TE and TM polarizations.

Paper Details

Date Published: 1 June 2017
PDF: 5 pages
J. Micro/Nanolith. 16(2) 025502 doi: 10.1117/1.JMM.16.2.025502
Published in: Journal of Micro/Nanolithography, MEMS, and MOEMS Volume 16, Issue 2
Show Author Affiliations
Maryam Ali Akbar Ganji, Malek Ashtar Univ. of Technology (Iran)
Reza Asadi, Malek Ashtar Univ. of Technology (Iran, Islamic Republic of)


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