Share Email Print
cover

Journal of Micro/Nanolithography, MEMS, and MOEMS

Design and fabrication of a MEMS-based gas sensor containing WO3 sensitive layer for detection of NO2
Author(s): Chengyang Wang; Jiandong Jin; Yuling Li; Wenbo Ding; Mingjun Dai
Format Member Price Non-Member Price
PDF $20.00 $25.00

Paper Abstract

A gas sensor based on microelectromechanical systems (MEMS) technology containing a WO 3 sensitive layer was designed, simulated, and fabricated. The gas sensor consists of a silicon substrate, a platinum microheater, gold interdigitated electrodes, and a WO 3 sensitive layer. The active area with dimensions of 0.4    mm × 0.4    mm is located at the center of a sensor ( 3    mm × 3    mm ). The experimental results show that the microheater provided heating for the WO 3 sensitive layer at low power consumption and accurate temperature control. At a power consumption of only 40 mW, the temperature reached 319°C at the center of the MEMS platform with uniform heating. In addition to that, the above mentioned gas sensor exhibited a high response to NO 2 with optimized sensitivity recorded at the working temperature of 170°C. With 10 ppb of NO 2 , the response of the sensor could reach up to 5.8 and the power consumption is 17.2 mW.

Paper Details

Date Published: 6 January 2017
PDF: 7 pages
J. Micro/Nanolith. MEMS MOEMS 16(1) 015002 doi: 10.1117/1.JMM.16.1.015002
Published in: Journal of Micro/Nanolithography, MEMS, and MOEMS Volume 16, Issue 1
Show Author Affiliations
Chengyang Wang, China Electronics Technology Group Corp. (China)
Jiandong Jin, China Electronics Technology Group Corp. (China)
Yuling Li, China Electronics Technology Group Corp. (China)
Wenbo Ding, China Electronics Technology Group Corp. (China)
Mingjun Dai, Jilin Univ. (China)


© SPIE. Terms of Use
Back to Top