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Journal of Micro/Nanolithography, MEMS, and MOEMS

Design technology co-optimization assessment for directed self-assembly-based lithography: design for directed self-assembly or directed self-assembly for design?
Author(s): Kafai Lai; Chi-Chun Liu; Hsinyu Tsai; Yongan Xu; Cheng Chi; Ananthan Raghunathan; Parul Dhagat; Lin Hu; Oseo Park; Sunggon Jung; Wooyong Cho; Jaime Morillo; Jed Pitera; Kristin Schmidt; Mike Guillorn; Markus Brink; Daniel Sanders; Nelson Felix; Todd Bailey; Matthew Colburn
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Paper Abstract

We report a systematic study of the feasibility of using directed self-assembly (DSA) in real product design for 7-nm fin field effect transistor (FinFET) technology. We illustrate a design technology co-optimization (DTCO) methodology and two test cases applying both line/space type and via/cut type DSA processes. We cover the parts of DSA process flow and critical design constructs as well as a full chip capable computational lithography framework for DSA. By co-optimizing all process flow and product design constructs in a holistic way using a computational DTCO flow, we point out the feasibility of manufacturing using DSA in an advanced FinFET technology node and highlight the issues in the whole DSA ecosystem before we insert DSA into manufacturing.

Paper Details

Date Published: 7 February 2017
PDF: 13 pages
J. Micro/Nanolith. MEMS MOEMS 16(1) 013502 doi: 10.1117/1.JMM.16.1.013502
Published in: Journal of Micro/Nanolithography, MEMS, and MOEMS Volume 16, Issue 1
Show Author Affiliations
Kafai Lai, IBM Thomas J. Watson Research Ctr. (United States)
Chi-Chun Liu, IBM Corp. (United States)
Hsinyu Tsai, IBM Thomas J. Watson Research Ctr. (United States)
Yongan Xu, IBM Corp. (United States)
Cheng Chi, IBM Corp. (United States)
Ananthan Raghunathan, GLOBALFOUNDRIES Inc. (United States)
Parul Dhagat, GLOBALFOUNDRIES Inc. (United States)
Lin Hu, GLOBALFOUNDRIES Inc. (United States)
Oseo Park, GLOBALFOUNDRIES Inc. (United States)
Sunggon Jung, Samsung Electronics Corp. (United States)
Wooyong Cho, Samsung Electronics Corp. (United States)
Jaime Morillo, IBM Corp. (United States)
Jed Pitera, IBM Research - Almaden (United States)
Kristin Schmidt, IBM Research - Almaden (United States)
Mike Guillorn, IBM Thomas J. Watson Research Ctr. (United States)
Markus Brink, IBM Thomas J. Watson Research Ctr. (United States)
Daniel Sanders, IBM Research - Almaden (United States)
Nelson Felix, IBM Corp. (United States)
Todd Bailey, GLOBALFOUNDRIES Inc. (United States)
Matthew Colburn, IBM Corp. (United States)

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