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Journal of Micro/Nanolithography, MEMS, and MOEMS

Large area gratings by x-ray LIGA dynamic exposure for x-ray phase-contrast imaging
Author(s): Tobias J. Schröter; Frieder Koch; Pascal Meyer; Martin Baumann; Daniel Münch; Danays Kunka; Sabine Engelhardt; Marcus Zuber; Tilo Baumbach; Jürgen Mohr
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Paper Abstract

X-ray differential phase-contrast imaging (DPCI) using a Talbot–Lau interferometer at a conventional tube source has continuously found applications since its first demonstration. It requires high aspect ratio grating structures with a feature size in the micrometer range that are fabricated using lithographie, galvanik und abformung technology. To overcome the current limitation in grating area, an exposure strategy—continuous exposure—has been developed. In this case, the mask is fixed in respect to the synchrotron beam and only the substrate is scanned. Thus, the grating area is given by the scanning length which is much larger than the actual mask size. The design, needs, and tolerances to adopt this process of dynamic exposure will be described. Furthermore, the first tests using this method will be presented. Gratings with a metal aspect ratio of 11 and a period of 10    μ m were fabricated on an area of 165    mm × 65    mm . First imaging results demonstrate the suitability of this method. No differences in the visibility or in x-ray image compared to gratings fabricated by the standard method could be found.

Paper Details

Date Published: 12 January 2017
PDF: 6 pages
J. Micro/Nanolith. MEMS MOEMS 16(1) 013501 doi: 10.1117/1.JMM.16.1.013501
Published in: Journal of Micro/Nanolithography, MEMS, and MOEMS Volume 16, Issue 1
Show Author Affiliations
Tobias J. Schröter, Karlsruher Institut für Technologie (Germany)
Frieder Koch, Karlsruher Institut für Technologie (Germany)
Pascal Meyer, Karlsruher Institut für Technologie (Germany)
Martin Baumann, Karlsruher Institut für Technologie (Germany)
Daniel Münch, Karlsruher Institut für Technologie (Germany)
Danays Kunka, Karlsruher Institut für Technologie (Germany)
Sabine Engelhardt, Karlsruher Institut für Technologie (Germany)
Marcus Zuber, Karlsruher Institut für Technologie (Germany)
Tilo Baumbach, Karlsruher Institut für Technologie (Germany)
Jürgen Mohr, Karlsruher Institut für Technologie (Germany)


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