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Journal of Micro/Nanolithography, MEMS, and MOEMS

Uncertainty in roughness measurements: putting error bars on line-edge roughness
Author(s): Chris A. Mack
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Paper Abstract

Measurement of line-edge or linewidth roughness involves uncertainty, like all measurements, and an estimate of that uncertainty should be reported whenever a roughness measurement is reported. However, roughness measurement uncertainty estimates are complicated by the correlations along the length of the rough feature. As a result, roughness measurements are often not accompanied by uncertainty estimates or error bars on graphs. Here, both theoretical considerations and simulations of random rough features will be used to derive a simple formula to estimate the uncertainty of a roughness measurement using the standard parameters describing that roughness: standard deviation, correlation length, and roughness exponent. Additionally, a more accurate formula to estimate the systematic bias in roughness standard deviation is provided.

Paper Details

Date Published: 5 January 2017
PDF: 3 pages
J. Micro/Nanolith. MEMS MOEMS 16(1) 010501 doi: 10.1117/1.JMM.16.1.010501
Published in: Journal of Micro/Nanolithography, MEMS, and MOEMS Volume 16, Issue 1
Show Author Affiliations
Chris A. Mack, Lithoguru.com (United States)


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