Journal of Micro/Nanolithography, MEMS, and MOEMSTwo-axis water-immersible microscanning mirror for scanning optics and acoustic microscopy
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Fast multiaxis scanning is useful for not only optical but also acoustic microscopic imaging. Although they have been used for optical scanning, the application of (MEMS) scanning mirrors in acoustic microscopy is still very limited due to their small mirror plate size, and more importantly, inability to operate in liquids (as ultrasound coupling media). A microfabricated two-axis water-immersible scanning mirror for optical and acoustic microscopy is reported. It has an optical and acoustically reflective mirror plate (
) to provide numerical aperture for ultrasound beam steering. Electromagnetic and mechanical analysis and simulation were conducted to estimate the mechanical tilting angle and resonance frequency of both fast and slow axes, which matches well with the measurement results. The fast axis has a resonant frequency of 320 Hz in air and 220 Hz in water, which is more than 10 times higher than that of the slow axis (24 Hz in air and 14 Hz in water). Under a 100-mA driving current, the scanning angles of the fast axis reached
in both air and water at the resonance frequency, respectively. The scanning angles of the slow axis reached
in air and
in water at resonant frequencies, respectively. Raster scanning of a collimated laser beam was achieved by driving both axes simultaneously close to their own resonance frequencies. The feasibility of using the two-axis water-immersible scanning mirror in scanning acoustic microscopy was also demonstrated.