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Journal of Micro/Nanolithography, MEMS, and MOEMS

Unified fabrication process for complex gratings
Author(s): Chi-Chun Ho; Jung-San Chen; Chia-Heng Lin; Yung-Chun Lee; Yu-Bin Chen
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Paper Abstract

A unified fabrication process was developed for four complex gratings. One period of each grating contains multiple pairs of ridges/grooves, and a ridge is usually composed of diversified materials. The process was suitable not only for mass fabrication but also for a large area. Moreover, with only one mold, four gratings could be obtained at once. Two 12×12  mm2 samples were fabricated for demonstration. Profile uniformity of each sample was confirmed with broadband infrared (2.5 to 25  μm) transmittance spectra. A good agreement between measured and modeling results was observed.

Paper Details

Date Published: 22 July 2016
PDF: 5 pages
J. Micro/Nanolith. 15(3) 034502 doi: 10.1117/1.JMM.15.3.034502
Published in: Journal of Micro/Nanolithography, MEMS, and MOEMS Volume 15, Issue 3
Show Author Affiliations
Chi-Chun Ho, National Cheng Kung Univ. (Taiwan)
Jung-San Chen, National Cheng Kung Univ. (Taiwan)
Chia-Heng Lin, National Cheng Kung Univ. (Taiwan)
Yung-Chun Lee, National Cheng Kung Univ. (Taiwan)
Yu-Bin Chen, National Cheng Kung Univ. (Taiwan)


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