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Journal of Micro/Nanolithography, MEMS, and MOEMS

Simple integration process of single-layer nanowire gratings for polarization navigation sensor
Author(s): Ran Zhang; Jinkui Chu; Ze Liu; Yinlong Wang
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Paper Abstract

A simple integration process of single-layer nanowire gratings (SLNGs) for polarization navigation sensor is proposed. The adaptive capacity of the nanoimprint process on uneven substrate is realized using compressed air and the flexible mold. The plasma ashing process is used to simplify the conventional SLNGs fabrication process. Based on the work mentioned above, six SLNGs areas with 1.3  mm×1.3  mm and six different directions are successfully integrated into a polarization sensitive structure applied to a polarization navigation sensor. The measurement result of quantum efficiency shows good sensitivity, and the angle of polarization measurement error is <±0.1  deg. The experiment result shows that the proposed process is applicable for the integration of large-area single-layer nanometal patterns.

Paper Details

Date Published: 8 July 2016
PDF: 6 pages
J. Micro/Nanolith. 15(3) 034501 doi: 10.1117/1.JMM.15.3.034501
Published in: Journal of Micro/Nanolithography, MEMS, and MOEMS Volume 15, Issue 3
Show Author Affiliations
Ran Zhang, Dalian Univ. of Technology (China)
Jinkui Chu, Dalian Univ. of Technology (China)
Ze Liu, Dalian Univ. of Technology (China)
Yinlong Wang, Dalian Univ. of Technology (China)


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