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Journal of Micro/Nanolithography, MEMS, and MOEMS • Open Access

Scanning coherent diffractive imaging methods for actinic extreme ultraviolet mask metrology
Author(s): Patrick Helfenstein; Istvan Mohacsi; Rajendran Rajeev; Yasin Ekinci

Paper Abstract

For the successful implementation of extreme ultraviolet (EUV) lithography in the upcoming technology nodes, a major challenge to overcome is the stable and reliable detection and characterization of mask defects. We have recently presented a reflective mode EUV mask scanning lensless imaging tool (RESCAN) which was installed at the XIL-II beamline of the swiss light source and showed reconstructed aerial images of test patterns on EUV masks. RESCAN uses scanning coherent diffractive imaging (SCDI) methods to obtain actinic aerial images of EUV photomasks and was designed for 80 nm onmask resolution. Our SCDI algorithm reconstructs the measured sample by iteratively solving the phase problem using overdetermined diffraction data gathered by scanning across the specimen with a finite illumination. It provides the phase and amplitude aerial images of EUV photomasks with high resolution without the need to use high numerical aperture (NA) lenses. Contrary to scanning microscopy and full-field microscopy, where the resolution is limited by the spot size or NA of the lens, the achievable resolution with our method depends on the detector noise and NA of the detector. To increase the resolution of our tool, we upgraded RESCAN with a detector and algorithms. Here, we present the results obtained with the tool that is capable of up to 40-nm onmask resolution. We believe that the realization of our prototype marks a significant step toward overcoming the limitations imposed by methods relying on imaging optics and shows a viable solution for actinic mask metrology.

Paper Details

Date Published: 16 September 2016
PDF: 5 pages
J. Micro/Nanolith. MEMS MOEMS 15(3) 034006 doi: 10.1117/1.JMM.15.3.034006
Published in: Journal of Micro/Nanolithography, MEMS, and MOEMS Volume 15, Issue 3
Show Author Affiliations
Patrick Helfenstein, Paul Scherrer Institut (Switzerland)
Istvan Mohacsi, Paul Scherrer Institut (Switzerland)
Rajendran Rajeev, Paul Scherrer Institut (Switzerland)
Yasin Ekinci, Paul Scherrer Institut (Switzerland)

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