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Journal of Micro/Nanolithography, MEMS, and MOEMS

Realization of large-scale photonic crystal cavity-based devices
Author(s): Amit Kumar Goyal; Hemant Sankar Dutta; Sumitra Singh; Mandeep Kaur; Sudhir Husale; Suchandan Pal
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Paper Abstract

This paper demonstrates an approach for fabricating large-scale photonic crystal (PhC)-based devices using a combination of optical and focused ion beam (FIB) lithography techniques. Optical lithography along with reactive ion etching parameters is optimized to realize the layout of device structure and thereafter FIB milling is optimized to realize the designed PhC structure at those identified locations. At first, with the help of a specially designed mask and using optical lithography along with reactive ion etching, a number of rectangular areas of dimension of 10  μm×20  μm along with input and output waveguides of width ∼700  nm and thickness of ∼250  nm have been fabricated. Subsequently, use of FIB milling, a periodic PhC structure of lattice constant of 600 nm, having a hole diameter of ∼480  nm along with a defect hole diameter of ∼250  nm have been realized successfully on the selected areas. This method shows a promising application in fabricating PhC structure with device size <1  cm2 at large scale, eliminating the problems of standard nanolithography techniques.

Paper Details

Date Published: 8 September 2016
PDF: 5 pages
J. Micro/Nanolith. MEMS MOEMS 15(3) 031608 doi: 10.1117/1.JMM.15.3.031608
Published in: Journal of Micro/Nanolithography, MEMS, and MOEMS Volume 15, Issue 3
Show Author Affiliations
Amit Kumar Goyal, CSIR-Central Electronics Engineering Research Institute (India)
Academy of Scientific & Innovative Research (AcSIR) (India)
Hemant Sankar Dutta, Academy of Scientific & Innovative Research (AcSIR) (India)
Council of Scientific and Industrial Research (India)
Sumitra Singh, Council of Scientific and Industrial Research (India)
Mandeep Kaur, Council of Scientific and Industrial Research (India)
Sudhir Husale, Council of Scientific and Industrial Research (India)
Suchandan Pal, Academy of Scientific & Innovative Research (AsIR) (India)
Council of Scientific and Industrial Research (India)


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