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Journal of Micro/Nanolithography, MEMS, and MOEMS • new

Characterization of charging-induced pattern positioning errors in advanced mask making
Author(s): Chien-Cheng Chen; Yen-Cheng Ho; Shao-Wen Chang; Chia-Jen Chen; Ta-Cheng Lien; Chih-Cheng Lin; Hsin-Chang Lee; Anthony Yen
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Paper Abstract

Charging-induced pattern positioning errors (CIPPEs) from a 50-kV variable-shape e-beam writer on an opaque-MoSi-over-glass mask has been carefully characterized by directly measuring the pattern shifts using a high-accuracy mask registration tool. In addition, the reported behaviors associated with the CIPPEs, exponentially decaying in space and sign flipping with increasing pattern density (PD), another seldom-mentioned error component, behaving like a constant offset in space and becoming stronger with increasing PD, is found. The authors repeat the experiment with a charge dissipation layer coated atop the resist to experimentally explore the origins of these two phenomena and find that the exponential components, removable by the charge dissipating layer (CDL), result from the well-known resist charging effect but the constant offset, remain existing with the CDL, does not. From the result of Monte Carlo simulations, the constant component is speculated to result from blank charging. This finding can give important insights into the model-based charging effect correction as well as the effectiveness of the CDL.

Paper Details

Date Published: 3 June 2016
PDF: 7 pages
J. Micro/Nanolith. 15(2) 021409 doi: 10.1117/1.JMM.15.2.021409
Published in: Journal of Micro/Nanolithography, MEMS, and MOEMS Volume 15, Issue 2
Show Author Affiliations
Chien-Cheng Chen, Taiwan Semiconductor Manufacturing Co. Ltd. (Taiwan)
Yen-Cheng Ho, Taiwan Semiconductor Manufacturing Company (Taiwan)
Shao-Wen Chang, Taiwan Semiconductor Manufacturing Co. Ltd. (Taiwan)
Chia-Jen Chen, Taiwan Semiconductor Manufacturing Co. Ltd. (Taiwan)
Ta-Cheng Lien, Taiwan Semiconductor Manufacturing Co. Ltd. (Taiwan)
Chih-Cheng Lin, Taiwan Semiconductor Manufacturing Co. Ltd. (Taiwan)
Hsin-Chang Lee, Taiwan Semiconductor Manufacturing Co. Ltd. (Taiwan)
Anthony Yen, Taiwan Semiconductor Manufacturing Co. Ltd. (Taiwan)


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