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Journal of Micro/Nanolithography, MEMS, and MOEMS

In-plane monolithic microscanner with two synchronized, self-aligned flat mirrors and compliant springs
Author(s): Alaa Eldin S. M. Elhady Ahmed; Mohamed A. E. Mahmoud; Diaa A. M. Khalil
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Paper Abstract

This work proposes an architecture for a wide-angle, self-aligned, in-plane monolithic scanner fabricated using the deep reactive ion etching technology. The fabricated microscanner provides an optical scanning in-plane angle of about 86 deg and operates at the speed of 2.73 kHz. The scanning is achieved using two synchronized, flat mirrors coupled mechanically to allow for wide-angle scanning and connected through a compliant structure to allow the use of a linear comb actuator. This wide-angle, in-plane scanning opens the door for many applications, especially for handheld optical displays.

Paper Details

Date Published: 29 March 2016
PDF: 8 pages
J. Micro/Nanolith. MEMS MOEMS 15(1) 015501 doi: 10.1117/1.JMM.15.1.015501
Published in: Journal of Micro/Nanolithography, MEMS, and MOEMS Volume 15, Issue 1
Show Author Affiliations
Alaa Eldin S. M. Elhady Ahmed, Ain Shams Univ. (Egypt)
Mohamed A. E. Mahmoud, Ain Shams Univ. (Egypt)
Si-Ware Systems (Egypt)
Diaa A. M. Khalil, Si-Ware Systems (Egypt)
Ain Shams Univ. (Egypt)

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