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Journal of Micro/Nanolithography, MEMS, and MOEMS

Flexible, high-density microphotodiode array with integrated sputtered iridium oxide electrodes for retinal stimulation
Author(s): Frank Yang; Mao-Yen Chang; Zung-Hua Yang; Chih-Ciao Teng; Long-Sheng Fan
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Paper Abstract

To assess the charge-injection capacity of the sputtered iridium oxide film (SIROF) electrode on the retinal CMOS image sensor (CIS) chip, a polyimide-based flex device was designed and fabricated to package the retinal CIS chip. The polyimide-flex-based packaging process keeps the surface of photosensors clean, and the measured connection resistance meets the packaging requirement of the low-power retinal CIS chip. The in vitro experimental results show that the small SIROF electrodes can provide a biphasic charge injection per phase of 3.9  nC/ph to achieve the stimulation threshold at a polarization potential of −0.44  V.

Paper Details

Date Published: 11 March 2016
PDF: 8 pages
J. Micro/Nanolith. 15(1) 015002 doi: 10.1117/1.JMM.15.1.015002
Published in: Journal of Micro/Nanolithography, MEMS, and MOEMS Volume 15, Issue 1
Show Author Affiliations
Frank Yang, National Tsing Hua Univ. (Taiwan)
Mao-Yen Chang, National Tsing Hua Univ. (Taiwan)
Zung-Hua Yang, National Tsing Hua Univ. (Taiwan)
Chih-Ciao Teng, National Tsing Hua Univ. (Taiwan)
Long-Sheng Fan, National Tsing Hua Univ. (Taiwan)


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