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Journal of Micro/Nanolithography, MEMS, and MOEMS

Effect of electron beam irradiation on thin metal films on glass surfaces in a submicrometer scale
Author(s): Filipp E. Komissarenko; Ivan S. Mukhin; Alexander O. Golubok; Nikolay V. Nikonorov; Mikhail A. Prosnikov; Alexander I. Sidorov
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Paper Abstract

It is shown experimentally that the irradiation of thin Al and Au films of thickness 50 to 100 nm on a silicate glass surface by electrons results in effects that differ principally depending on the electron energy. For energies of 5 to 15 keV, the irradiation leads to an increase in the film thickness throughout the irradiated zone and a decrease in the thickness in the surrounding area. For an energy of 25 keV, the irradiation leads to dissolving the Au film in glass in the irradiated zone. The mechanisms of the observed effects are discussed.

Paper Details

Date Published: 1 February 2016
PDF: 7 pages
J. Micro/Nanolith. 15(1) 013502 doi: 10.1117/1.JMM.15.1.013502
Published in: Journal of Micro/Nanolithography, MEMS, and MOEMS Volume 15, Issue 1
Show Author Affiliations
Filipp E. Komissarenko, ITMO Univ. (Russia)
Ivan S. Mukhin, ITMO Univ. (Russian Federation)
Saint Petersburg State Univ. (Russian Federation)
Alexander O. Golubok, ITMO Univ. (Russia)
Nikolay V. Nikonorov, ITMO Univ. (Russia)
Mikhail A. Prosnikov, Ioffe Physical-Technical Institute (Russia)
Alexander I. Sidorov, ITMO Univ. (Russia)


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