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Journal of Micro/Nanolithography, MEMS, and MOEMS

Investigation of SU8 as a structural material for fabricating passive millimeter-wave and terahertz components
Author(s): Yingtao Tian; Xiaobang Shang; Yi Wang; Michael J. Lancaster
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Paper Abstract

This paper provides a systematic review of the technical issues of SU8 fabrication for millimeter-wave and terahertz components based on research carried out at the University of Birmingham in the past decade. A design-for-manufacturability approach is followed. The flexibility of the SU8 process enables many device structures. Challenges and problems during fabrication will be discussed and demonstrated with examples. The measurement of the devices is also a significant challenge when the critical dimensions of the device shrink and special testing fixtures are needed in some cases. Finally, a brief overview of the issues discussed above is given for future guidance.

Paper Details

Date Published: 29 December 2015
PDF: 9 pages
J. Micro/Nanolith. 14(4) 044507 doi: 10.1117/1.JMM.14.4.044507
Published in: Journal of Micro/Nanolithography, MEMS, and MOEMS Volume 14, Issue 4
Show Author Affiliations
Yingtao Tian, The Univ. of Birmingham (United Kingdom)
The Univ. of Manchester (United Kingdom)
Xiaobang Shang, The Univ. of Birmingham (United Kingdom)
Yi Wang, Univ. of Greenwich (United Kingdom)
Michael J. Lancaster, The Univ. of Birmingham (United Kingdom)

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