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Journal of Micro/Nanolithography, MEMS, and MOEMS

Optically addressed deformable mirror for low-light applications
Author(s): Jed Khoury; Jarrett Vella
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Paper Abstract

A microelectromechanical deformable mirror device that is optically addressed and designed to actuate at extremely low-light levels for wavefront error correction is fabricated and theoretically described. The device consists of an optically transparent substrate, a photoconductive detector, a thin-film resistor, and insulating posts that support a mirror. The mirror is suspended over the detector by the insulating posts and is deformed when the detector is illuminated through the substrate. The actuation of the device is theoretically modeled as a capacitor in series with a photoconductor under an external dc bias. Under an external 6.3 V dc bias and when back-illuminated with 501 μW∕cm2 light at 539 nm, a total mirror deformation of 474.3 nm was obtained and substantiated by numerical modeling. This represents the highest actuation sensitivity to date that results in mirror deflection values in hundreds of nanometers.

Paper Details

Date Published: 1 October 2015
J. Micro/Nanolith. MEMS MOEMS 14(4) 041312 doi: 10.1117/1.JMM.14.4.041312
Published in: Journal of Micro/Nanolithography, MEMS, and MOEMS Volume 14, Issue 4
Show Author Affiliations
Jed Khoury, Lartec, Inc. (United States)
Jarrett Vella, Air Force Research Lab. (United States)

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