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Journal of Micro/Nanolithography, MEMS, and MOEMS

Optical frequency comb profilometry with a compressive sensing–based single-pixel camera composed of digital micromirror devices and a two-frequency method for meter-order depth measurements
Author(s): Quang Duc Pham; Yoshio Hayasaki
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Paper Abstract

We demonstrated optical-frequency-comb profilometry with a compressive sensing–based single-pixel camera composed of digital micromirror devices and a photodetector for measurement of large-depth objects. Use of two harmonic frequencies allowed us to measure an object with a meter-order depth without any 2π-phase ambiguity. Profilometry with 10×10 pixels using the 12th and 13th harmonics of the fundamental frequency of 76 MHz gave a noise level of ∼10 μm in terms of standard deviation. Linking the measurement results obtained using one and two frequencies gave an axial dynamic range of ∼3.9×105.

Paper Details

Date Published: 10 August 2015
PDF: 5 pages
J. Micro/Nanolith. 14(4) 041305 doi: 10.1117/1.JMM.14.4.041305
Published in: Journal of Micro/Nanolithography, MEMS, and MOEMS Volume 14, Issue 4
Show Author Affiliations
Quang Duc Pham, Utsunomiya Univ. (Japan)
Yoshio Hayasaki, Utsunomiya Univ. (Japan)


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