Journal of Micro/Nanolithography, MEMS, and MOEMSOptical frequency comb profilometry with a compressive sensing–based single-pixel camera composed of digital micromirror devices and a two-frequency method for meter-order depth measurements
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We demonstrated optical-frequency-comb profilometry with a compressive sensing–based single-pixel camera composed of digital micromirror devices and a photodetector for measurement of large-depth objects. Use of two harmonic frequencies allowed us to measure an object with a meter-order depth without any 2π-phase ambiguity. Profilometry with 10×10 pixels using the 12th and 13th harmonics of the fundamental frequency of 76 MHz gave a noise level of ∼10 μm in terms of standard deviation. Linking the measurement results obtained using one and two frequencies gave an axial dynamic range of ∼3.9×105.