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Journal of Micro/Nanolithography, MEMS, and MOEMS

Low-cost reciprocating electromagnetic-based micropump for high-flow rate applications
Author(s): Abbas Hakim Sima; Alinaghi Salari; Mohammad Behshad Shafii
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Paper Abstract

A reciprocating single-chamber micropump is designed and experimentally tested. The actuation technique of the pump is based on Lorentz force acting on an array of low-weight microwires placed on a flexible membrane surface. A square-wave electric current (5.6 and 7.8 A) with a low-frequency range (5.6 to 7.6 Hz) is applied through the microwires in the presence of a perpendicular magnetic field (0.08 to 0.09 T). The resultant oscillating Lorentz force causes the membrane to oscillate with the same frequency, and pushes the fluid to flow toward the outlet using a high-efficiency ball-valve. The micropump has exhibited a maximum efficiency of 2.03% with a flow rate as high as 490  μl/s and back pressure up to 1.5 kPa. Having a high self-pumping frequency of Fsp=32.71/min compared to other micropumps, our proposed pump is suitable for a wide range of applications specifically for biofluid transport.

Paper Details

Date Published: 3 September 2015
PDF: 8 pages
J. Micro/Nanolith. 14(3) 035003 doi: 10.1117/1.JMM.14.3.035003
Published in: Journal of Micro/Nanolithography, MEMS, and MOEMS Volume 14, Issue 3
Show Author Affiliations
Abbas Hakim Sima, Sharif Energy Research Institute (Iran, Islamic Republic of)
Alinaghi Salari, Sharif Univ. of Technology (Iran, Islamic Republic of)
Mohammad Behshad Shafii, Sharif Univ. of Technology (Iran, Islamic Republic of)


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