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Journal of Micro/Nanolithography, MEMS, and MOEMS

Design and fabrication of a reduced stiction radio frequency MEMS switch
Author(s): Deepak Bansal; Anuroop Bajpai; Prem Kumar; Amit Kumar; Maninder Kaur; Kamaljit Rangra
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Paper Abstract

The design, fabrication, and mechanical characterization of a compact-reduced stiction see-saw radio frequency MEMS switch are presented. The switch has a resonance frequency of 9.8 kHz with a corresponding switching speed of 46  μs. Use of a floating metal layer and optimal contact area ensures reduced stiction and smaller capacitive leakage. Overall size of the switch is 0.535 (0.50×1.070) mm2. Reduction in up-state capacitance also results in improvement in self-actuation voltage, insertion, and return loss. The optimized topology has improved the stiction and power handling of the switch.

Paper Details

Date Published: 3 September 2015
PDF: 9 pages
J. Micro/Nanolith. 14(3) 035002 doi: 10.1117/1.JMM.14.3.035002
Published in: Journal of Micro/Nanolithography, MEMS, and MOEMS Volume 14, Issue 3
Show Author Affiliations
Deepak Bansal, CSIR-Central Electronics Engineering Research Institute (India)
Sensors and Nanotechnology Group (India)
Academy of Scientific and Innovative Research (AcSIR) (India)
Anuroop Bajpai, CSIR-Central Electronics Engineering Research Institute (India)
Sensors and Nanotechnology Group (India)
Prem Kumar, CSIR-Central Electronics Engineering Research Institute (India)
Sensors and Nanotechnology Group (India)
Amit Kumar, CSIR-Central Electronics Engineering Research Institute (India)
Sensors and Nanotechnology Group (India)
Academy of Scientific and Innovative Research (AcSIR) (India)
Maninder Kaur, CSIR-Central Electronics Engineering Research Institute (India)
Sensors and Nanotechnology Group (India)
Kamaljit Rangra, CSIR-Central Electronics Engineering Research Institute (India)
Sensors and Nanotechnology Group (India)
Academy of Scientific and Innovative Research (AcSIR) (India)


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