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Journal of Micro/Nanolithography, MEMS, and MOEMS

Nanomechanical properties of solvent cast polystyrene and poly(methyl methacrylate) polymer blends and self-assembled block copolymers
Author(s): Matteo Lorenzoni; Laura Evangelio; Célia Nicolet; Christophe Navarro; Alvaro San Paulo; Gemma Rius; Francesc Pérez-Murano
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Paper Abstract

The nanomechanical properties of solvent-cast polymer thin films have been investigated using PeakForce™ Quantitative Nanomechanical Mapping. The samples consisted of films of polystyrene (PS) and poly(methyl methacrylate) (PMMA) obtained after the dewetting of toluene solution on a polymeric brush layer. Additionally, we have probed the mechanical properties of poly(styrene-b-methyl methacrylate) block copolymers (BCP) as randomly oriented thin films. The probed films have a critical thickness <50  nm and present features to be resolved <42  nm. The Young’s modulus values obtained through several nanoindentation experiments present a good agreement with previous literature, suggesting that the PeakForce™ technique could be crucial for BCP investigations, e.g., as a predictor of the mechanical stability of the different phases.

Paper Details

Date Published: 11 September 2015
PDF: 6 pages
J. Micro/Nanolith. MEMS MOEMS 14(3) 033509 doi: 10.1117/1.JMM.14.3.033509
Published in: Journal of Micro/Nanolithography, MEMS, and MOEMS Volume 14, Issue 3
Show Author Affiliations
Matteo Lorenzoni, Ctr. Nacional de Microelectrónica (Spain)
Laura Evangelio, Ctr. Nacional de Microelectrónica (Spain)
Célia Nicolet, Arkema S.A. (France)
Christophe Navarro, Arkema S.A. (France)
Alvaro San Paulo, Ctr. Nacional de Microelectronica (Spain)
Gemma Rius, Nagoya Institute of Technology (Japan)
Francesc Pérez-Murano, Ctr. Nacional de Microelectrónica (Spain)

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