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Journal of Micro/Nanolithography, MEMS, and MOEMS • Open Access

Development of nanoimprint processes for photovoltaic applications
Author(s): Hubert Hauser; Nico Tucher; Katharina Tokai; Patrick Schneider; Christine Wellens; Anne K. Volk; Sonja Seitz; Jan Benick; Simon Barke; Frank Dimroth; Claas Müller; Thomas Glinsner; Benedikt Bläsi

Paper Abstract

Due to its high resolution and applicability for large area patterning, nanoimprint lithography (NIL) is a promising technology for photovoltaic (PV) applications. However, a successful industrial application of NIL processes is only possible if large-area processing on thin, brittle, and potentially rough substrates can be achieved in a high-throughput process. The development of NIL processes using the SmartNIL technology from EV Group with a focus on PV applications is described. The authors applied this tooling to realize a honeycomb texture (8  μm period) on the front side of multicrystalline silicon solar cells, leading to an improvement in optical efficiency of 7% relative and a total efficiency gain of 0.5% absolute compared to the industrial standard texture (isotexture). On the rear side of monocrystalline silicon solar cells, the authors realized diffraction gratings to make use of light trapping effects. An absorption enhancement of up to 35% absolute at a wavelength of 1100 nm is demonstrated. Furthermore, photolithography was combined with NIL processes to introduce features for metal contacts into honeycomb master structures, which were initially realized using interference lithography. As a final application, the authors investigated the realization of very fine contact fingers with prismatic shape in order to minimize reflection losses.

Paper Details

Date Published: 29 July 2015
PDF: 6 pages
J. Micro/Nanolith. 14(3) 031210 doi: 10.1117/1.JMM.14.3.031210
Published in: Journal of Micro/Nanolithography, MEMS, and MOEMS Volume 14, Issue 3
Show Author Affiliations
Hubert Hauser, Fraunhofer-Institut für Solare Energiesysteme (Germany)
Nico Tucher, Fraunhofer-Institut für Solare Energiesysteme (Germany)
Katharina Tokai, Fraunhofer-Institut für Solare Energiesysteme (Germany)
Patrick Schneider, Fraunhofer-Institut für Solare Energiesysteme (Germany)
Christine Wellens, Fraunhofer-Institut für Solare Energiesysteme (Germany)
Anne K. Volk, Fraunhofer-Institut für Solare Energiesysteme (Germany)
Sonja Seitz, Fraunhofer-Institut für Solare Energiesysteme (Germany)
Jan Benick, Fraunhofer-Institut für Solare Energiesysteme (Germany)
Simon Barke, Fraunhofer-Institut für Solare Energiesysteme (Germany)
Frank Dimroth, Fraunhofer-Institut für Solare Energiesysteme (Germany)
Claas Müller, Univ. of Freiburg (Germany)
Thomas Glinsner, EV Group (Austria)
Benedikt Bläsi, Fraunhofer-Institut für Solare Energiesysteme (Germany)


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