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Journal of Micro/Nanolithography, MEMS, and MOEMS

Advanced electric-field scanning probe lithography on molecular resist using active cantilever
Author(s): Marcus Kaestner; Cemal Aydogan; Tzvetan Ivanov; Ahmad Ahmad; Tihomir Angelov; Alexander Reum; Valentyn Ishchuk; Yana Krivoshapkina; Manuel Hofer; Steve Lenk; Ivaylo Atanasov; Mathias Holz; Ivo W. Rangelow
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Paper Abstract

The routine “on demand” fabrication of features smaller than 10 nm opens up new possibilities for the realization of many devices. Driven by the thermally actuated piezoresistive cantilever technology, we have developed a prototype of a scanning probe lithography (SPL) platform which is able to image, inspect, align, and pattern features down to the single digit nanoregime. Here, we present examples of practical applications of the previously published electric-field based current-controlled scanning probe lithography. In particular, individual patterning tests are carried out on calixarene by using our developed table–top SPL system. We have demonstrated the application of a step-and-repeat SPL method including optical as well as atomic force microscopy-based navigation and alignment. The closed-loop lithography scheme was applied to sequentially write positive and negative tone features. Due to the integrated unique combination of read–write cycling, each single feature is aligned separately with the highest precision and inspected after patterning. This routine was applied to create a pattern step by step. Finally, we have demonstrated the patterning over larger areas, over existing topography, and the practical applicability of the SPL processes for lithography down to 13-nm pitch patterns. To enhance the throughput capability variable beam diameter electric field, current-controlled SPL is briefly discussed.

Paper Details

Date Published: 10 June 2015
PDF: 11 pages
J. Micro/Nanolith. 14(3) 031202 doi: 10.1117/1.JMM.14.3.031202
Published in: Journal of Micro/Nanolithography, MEMS, and MOEMS Volume 14, Issue 3
Show Author Affiliations
Marcus Kaestner, Technische Univ. Ilmenau (Germany)
Cemal Aydogan, Technische Univ. Ilmenau (Germany)
Tzvetan Ivanov, Technische Univ. Ilmenau (Germany)
Ahmad Ahmad, Technische Univ. Ilmenau (Germany)
Tihomir Angelov, Technische Univ. Ilmenau (Germany)
Alexander Reum, Technische Univ. Ilmenau (Germany)
nano analytik GmbH (Germany)
Valentyn Ishchuk, Technische Univ. Ilmenau (Germany)
Yana Krivoshapkina, Technische Univ. Ilmenau (Germany)
Manuel Hofer, Technische Univ. Ilmenau (Germany)
nano analytik GmbH (Germany)
Steve Lenk, Technische Univ. Ilmenau (Germany)
Ivaylo Atanasov, Technische Univ. Ilmenau (Germany)
nano analytik GmbH (Germany)
Mathias Holz, nano analytik GmbH (Germany)
Ivo W. Rangelow, Technische Univ. Ilmenau (Germany)


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