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Journal of Micro/Nanolithography, MEMS, and MOEMS

Nanoelectromechanical systems-based metal-insulator-metal plasmonics tunable filter
Author(s): Kareem Khirallah; Mohamed A. Swillam
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Paper Abstract

Nanoelectromechanical systems (NEMS) design for active resonance frequency tuning of plasmonics optical filter is proposed and discussed. The design is based on controlling the relative position between two stubs in a metal–insulator–metal plasmonics waveguide using NEMS technology. The analysis of the optical design as well as the mechanical design is performed. Finally, a reasonable fabrication process of the device is proposed. For the suggested mechanical design parameters, the optical resonance wavelength can be tuned from 1.45 to 1.65  μm using 7VDC actuation voltage.

Paper Details

Date Published: 6 April 2015
PDF: 6 pages
J. Micro/Nanolith. 14(2) 025501 doi: 10.1117/1.JMM.14.2.025501
Published in: Journal of Micro/Nanolithography, MEMS, and MOEMS Volume 14, Issue 2
Show Author Affiliations
Kareem Khirallah, Boston Univ. (United States)
Mohamed A. Swillam, The American Univ. in Cairo (Egypt)


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