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Journal of Micro/Nanolithography, MEMS, and MOEMS

Comparison and analysis of capacitive humidity sensors with water vapor inlet holes of different depths
Author(s): Kyo Sang Choi; Deok Su Kim; Hee June Yang; Min Soo Ryu; Ji Sung Chae; Sung Pil Chang
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Paper Abstract

This paper describes the design, fabrication, and characterization of a capacitive humidity sensor with water vapor inlet holes of different depths. The humidity sensors were composed of a SiO2 insulation layer, a bottom electrode, a polyimide (PI) sensing layer, and a top electrode containing water vapor inlet holes. The sensors were 3.5  mm×3.5  mm with a 0.7-μm thick PI-based sensing layer. A humidity sensor with a partially etched PI layer in the water vapor inlet holes had the following characteristics: sensitivity 1500fF/%RH, hysteresis 0.37%, and a response time of 70 s.

Paper Details

Date Published: 9 April 2015
PDF: 7 pages
J. Micro/Nanolith. 14(2) 025001 doi: 10.1117/1.JMM.14.2.025001
Published in: Journal of Micro/Nanolithography, MEMS, and MOEMS Volume 14, Issue 2
Show Author Affiliations
Kyo Sang Choi, Inha Univ. (Korea, Republic of)
Deok Su Kim, Inha Univ. (Korea, Republic of)
Hee June Yang, Inha Univ. (Korea, Republic of)
Min Soo Ryu, Inha Univ. (Korea, Republic of)
Ji Sung Chae, Inha Univ. (Korea, Republic of)
Sung Pil Chang, Inha Univ. (Korea, Republic of)


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