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Journal of Micro/Nanolithography, MEMS, and MOEMS • Open Access

In-chip direct laser writing of a centimeter-scale acoustic micromixer
Author(s): Jorick van ‘t Oever; Niels Spannenburg; Herman Offerhaus; Dirk van den Ende; Jennifer L. Herek; Frieder Mugele

Paper Abstract

A centimeter-scale micromixer was fabricated by two-photon polymerization inside a closed microchannel using direct laser writing. The structure consists of a repeating pattern of 20  μm×20  μm×155  μm acrylate pillars and extends over 1.2 cm. Using external ultrasonic actuation, the micropillars locally induce streaming with flow speeds of 30  μm s−1. The fabrication method allows for large flexibility and more complex designs

Paper Details

Date Published: 21 April 2015
PDF: 7 pages
J. Micro/Nanolith. 14(2) 023503 doi: 10.1117/1.JMM.14.2.023503
Published in: Journal of Micro/Nanolithography, MEMS, and MOEMS Volume 14, Issue 2
Show Author Affiliations
Jorick van ‘t Oever, Univ. Twente (Netherlands)
Niels Spannenburg, Univ. Twente (The Netherlands)
Herman Offerhaus, Univ. Twente (The Netherlands)
Dirk van den Ende, Univ. Twente (The Netherlands)
Jennifer L. Herek, Univ. Twente (The Netherlands)
Frieder Mugele, Univ. Twente (The Netherlands)


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