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Journal of Micro/Nanolithography, MEMS, and MOEMS

Gate double patterning strategies for 10-nm node FinFET devices
Author(s): Hubert Hody; Vasile Paraschiv; David Hellin; Tom Vandeweyer; Guillaume Boccardi; Kaidong Xu
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Paper Abstract

Amorphous silicon (a-Si) gates with a length of 20 nm have been obtained in a “line & cut” double patterning process. The first pattern was printed with extreme ultraviolet photoresist (PR) and had a critical dimension (CD) close to 30 nm, which imposed a triple challenge on the etch: limited PR budget, high line width roughness, and significant CD reduction. Combining a plasma pre-etch treatment of the PR with the etch of the appropriate hard mask underneath successfully addressed the two former challenges, while the latter one was overcome by spreading the CD reduction on the successive layers of the stack.

Paper Details

Date Published: 5 March 2015
PDF: 6 pages
J. Micro/Nanolith. MEMS MOEMS 14(1) 014504 doi: 10.1117/1.JMM.14.1.014504
Published in: Journal of Micro/Nanolithography, MEMS, and MOEMS Volume 14, Issue 1
Show Author Affiliations
Hubert Hody, IMEC (Belgium)
Vasile Paraschiv, SC Etch Tech Solutions (Romania)
David Hellin, Lam Research Corp. (Belgium)
Tom Vandeweyer, IMEC (Belgium)
Guillaume Boccardi, IMEC (Belgium)
Kaidong Xu, IMEC (Belgium)

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