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Journal of Micro/Nanolithography, MEMS, and MOEMS

Biopattern transfer using diatom frustules for fabrication of functional micro/nanostructures
Author(s): Yonggang Jiang; Jianchao Fu; Junfeng Pan; Zhonglie An; Jun Cai; Deyuan Zhang
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Paper Abstract

Diatom frustules exhibit various sophisticated shapes with highly ordered hierarchical porous nanostructures, which are promising for applications in the biomimetic fabrication of nanostructured materials. We propose a universal biopattern transfer process for the fabrication of functional micro/nanostructures using diatom frustules as the biotemplates. Porous silicon microcylinders with a thickness of 20  μm are fabricated by deep reactive ion etching of a silicon substrate, which is covered by a layer of diatom frustules. With a similar process, a fast atom beam technique is used to etch the silicon substrate and silicon nanolattices are obtained. By depositing a thin layer of gold film on the diatom bonded silicon substrate, followed by releasing the diatom frustules by diluted HF, gold nanodisks with a thickness of 30 nm are successfully fabricated. The nanodisk array arranges in diamond or radial patterns, replicating the nanostructure of diatom frustules. In addition, a parylene nanodot array is also demonstrated using this diatom-based biopattern transfer process.

Paper Details

Date Published: 18 February 2015
PDF: 6 pages
J. Micro/Nanolith. MEMS MOEMS 14(1) 014502 doi: 10.1117/1.JMM.14.1.014502
Published in: Journal of Micro/Nanolithography, MEMS, and MOEMS Volume 14, Issue 1
Show Author Affiliations
Yonggang Jiang, BeiHang Univ. (China)
Jianchao Fu, BeiHang Univ. (China)
Junfeng Pan, BeiHang Univ. (China)
Zhonglie An, Tohoku Univ. (Japan)
Jun Cai, BeiHang Univ. (China)
Deyuan Zhang, BeiHang Univ. (China)

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