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Journal of Micro/Nanolithography, MEMS, and MOEMS • Open Access

350 Years of Scientific Journals
Author(s): Chris A. Mack

Paper Details

Date Published: 11 February 2015
PDF: 3 pages
J. Micro/Nanolith. 14(1) 010101 doi: 10.1117/1.JMM.14.1.010101
Published in: Journal of Micro/Nanolithography, MEMS, and MOEMS Volume 14, Issue 1
Show Author Affiliations
Chris A. Mack, Lithoguru.com (United States)


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