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Journal of Micro/Nanolithography, MEMS, and MOEMS

Evaluation of silicon tuning fork resonators under mechanical loads and space-relevant radiation conditions
Author(s): Tobias Bandi; Jacek Baborowski; Alex Dommann; Herbert R. Shea; Francis Cardot; Antonia Neels
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Paper Abstract

This work reports on mechanical tests and irradiations made on silicon bulk-acoustic wave resonators. The resonators were based on a tuning fork geometry and actuated by a piezoelectric aluminum nitride layer. They had a resonance frequency of 150 kHz and a quality factor of about 20,000 under vacuum. The susceptibility of the devices to radiation-induced degradation was investigated using 60Co γ-rays and 50 MeV protons with space-relevant doses of up to 170 krad. The performance of the devices after irradiation indicated a high tolerance to both ionizing damage and displacement damage effects. In addition, the device characteristics were evaluated after mechanical shock and vibration tests and only small effects on the devices were observed. In all experiments, no significant changes of the resonance characteristics were observed within the experimental uncertainty, which was below 100 ppm for the resonance frequency. The results support the efforts toward design and fabrication of highly reliable MEMS devices for space applications.

Paper Details

Date Published: 18 December 2014
PDF: 9 pages
J. Micro/Nanolith. 13(4) 043019 doi: 10.1117/1.JMM.13.4.043019
Published in: Journal of Micro/Nanolithography, MEMS, and MOEMS Volume 13, Issue 4
Show Author Affiliations
Tobias Bandi, Ecole Polytechnique Fédérale de Lausanne (Switzerland)
Ctr. Suisse d'Electronique et de Microtechnique SA (Switzerland)
Jacek Baborowski, Ctr. Suisse d'Electronique et de Microtechnique SA (Switzerland)
Alex Dommann, EMPA (Switzerland)
Herbert R. Shea, Ecole Polytechnique Fédérale de Lausanne (Switzerland)
Francis Cardot, Ctr. Suisse d'Electronique et de Microtechnique SA (Switzerland)
Antonia Neels, EMPA (Switzerland)


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