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Journal of Micro/Nanolithography, MEMS, and MOEMS

Electromechanical resonators based on electrospun ZnO nanofibers
Author(s): Somayeh Fardindoost; Saeed Mohammadi; Azam Iraji zad; Reza Sarvari; Seyed Peyman Shariatpanahi
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Paper Abstract

We present fabrication, characterization, and experimental results describing electrical actuation and readout of the mechanical vibratory response of electrospun ZnO nanofibers. For a fiber with an approximate radius of 200 nm and a length of 70  μm, a resonance frequency around 3.62 MHz with a quality factor (Q) of about 235 in air at ambient conditions is observed. It is shown that the measured frequency of the resonance is consistent with results from finite element simulations. Also, the measurements were performed in an enclosed chamber with controlled levels of ethanol vapor. The adsorption of ethanol causes a shift in the resonance frequency of the fibers, which can be related to the concentration of ethanol vapor for sensing purposes.

Paper Details

Date Published: 11 November 2014
PDF: 8 pages
J. Micro/Nanolith. 13(4) 043011 doi: 10.1117/1.JMM.13.4.043011
Published in: Journal of Micro/Nanolithography, MEMS, and MOEMS Volume 13, Issue 4
Show Author Affiliations
Somayeh Fardindoost, Sharif Univ. of Technology (Iran)
Saeed Mohammadi, Stanford Univ. (United States)
Azam Iraji zad, Sharif Univ. of Technology (Iran, Islamic Republic of)
Reza Sarvari, Sharif Univ. of Technology (Iran)
Seyed Peyman Shariatpanahi, Univ. of Tehran (Iran)


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