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Journal of Micro/Nanolithography, MEMS, and MOEMS

Fabrication of micropressure sensor using SU-8/silver as piezoresistor and overhead projector transparency as substrate
Author(s): Wah Seng Wong; Ishak Abdul Azid; Kamarulazizi Ibrahim; Mutharasu Devarajan
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Paper Abstract

This paper proposes a low-cost SU-8 pressure sensor fabricated using a piezoresistive material, SU-8/silver composite (SU-8/Ag), and a substrate material, overhead projector (OHP) transparency. SU-8/Ag has higher gauge factor (26.3) but shows a lower stiffness (2 GPa) compared with doped silicon. The OHP transparency substrate is cheap, easily forms the desired shape, is transparent to light (allows backside exposure), and allows for the dry release method through OHP transparency. Fabrication and characterization in this study were carried out using a typical semiconductor lab setup. The fabricated sensor showed high sensitivity (21.5  μV/Pa), low linearity error (Pearson’s correlation coefficient=0.994937), and no apparent hysteresis response. The fabricated sensor with SU-8/Ag as the piezoresistive material exhibited 41 times higher sensitivity compared to that found in a previous study based on SU-8 and doped polysilicon.

Paper Details

Date Published: 6 November 2014
PDF: 8 pages
J. Micro/Nanolith. MEMS MOEMS 13(4) 043009 doi: 10.1117/1.JMM.13.4.043009
Published in: Journal of Micro/Nanolithography, MEMS, and MOEMS Volume 13, Issue 4
Show Author Affiliations
Wah Seng Wong, Univ. Sains Malaysia (Malaysia)
Ishak Abdul Azid, Universiti Kuala Lumpur (Malaysia)
Kamarulazizi Ibrahim, Univ. Sains Malaysia (Malaysia)
Mutharasu Devarajan, Univ. Sains Malaysia (Malaysia)

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