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Journal of Micro/Nanolithography, MEMS, and MOEMS

UV LED lithography with digitally tunable exposure dose
Author(s): Murat Kaya Yapici; Ilyas Farhat
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Paper Abstract

This paper reports the development of a low-cost, portable, light-emitting diode (LED)-based ultraviolet (UV) exposure system. The major system components include UV-LEDs, a microcontroller, a digital-to-analog converter, and LED control circuitry. Through its front panel with a liquid crystal display and keypad, the UV-LED lithography system is able to receive user-defined values for exposure time and power, which allows the exposure dose to be tunable on demand. Compared to standard mask aligners, the UV-LED lithography system is a fraction of the cost, is simpler to construct using off-the shelf components, and does not require a complex infrastructure to operate. Such a reduction in system cost and complexity renders UV-LED lithography a perfect candidate for microlithography with large process windows typically suitable for MEMS, microfluidics applications.

Paper Details

Date Published: 21 October 2014
PDF: 5 pages
J. Micro/Nanolith. 13(4) 043004 doi: 10.1117/1.JMM.13.4.043004
Published in: Journal of Micro/Nanolithography, MEMS, and MOEMS Volume 13, Issue 4
Show Author Affiliations
Murat Kaya Yapici, Khalifa Univ. of Science, Technology and Research (United Arab Emirates)
Ilyas Farhat, Khalifa Univ. of Science, Technology and Research (United Arab Emirates)


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