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Journal of Micro/Nanolithography, MEMS, and MOEMS

Effect of measurement error budgets and hybrid metrology on qualification metrology sampling
Author(s): Matthew J. Sendelbach; Niv Sarig; Koichi Wakamoto; Hyang Kyun (Helen) Kim; Paul K. Isbester; Masafumi Asano; Kazuto Matsuki; Carmen Osorio; Chas Archie
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Paper Abstract

Until now, metrologists had no statistics-based method to determine the sampling needed for an experiment before the start that accuracy experiment. We show a solution to this problem called inverse total measurement uncertainty (TMU) analysis, by presenting statistically based equations that allow the user to estimate the needed sampling after providing appropriate inputs, allowing him to make important “risk versus reward” sampling, cost, and equipment decisions. Application examples using experimental data from scatterometry and critical dimension scanning electron microscope tools are used first to demonstrate how the inverse TMU analysis methodology can be used to make intelligent sampling decisions and then to reveal why low sampling can lead to unstable and misleading results. One model is developed that can help experimenters minimize sampling costs. A second cost model reveals the inadequacy of some current sampling practices—and the enormous costs associated with sampling that provides reasonable levels of certainty in the result. We introduce the strategies on how to manage and mitigate these costs and begin the discussion on how fabs are able to manufacture devices using minimal reference sampling when qualifying metrology steps. Finally, the relationship between inverse TMU analysis and hybrid metrology is explored.

Paper Details

Date Published: 19 December 2014
PDF: 14 pages
J. Micro/Nanolith. MEMS MOEMS 13(4) 041414 doi: 10.1117/1.JMM.13.4.041414
Published in: Journal of Micro/Nanolithography, MEMS, and MOEMS Volume 13, Issue 4
Show Author Affiliations
Matthew J. Sendelbach, Nova Measuring Instruments Ltd. (United States)
Niv Sarig, Nova Measuring Instruments Ltd. (Israel)
Koichi Wakamoto, Nova Measuring Instruments K.K. (Japan)
Hyang Kyun (Helen) Kim, Nova Measuring Instruments (Republic of Korea)
Paul K. Isbester, Nova Measuring Instruments Inc. (United States)
Masafumi Asano, Toshiba Corp. (Japan)
Kazuto Matsuki, Toshiba Corp. (Japan)
Carmen Osorio, GLOBALFOUNDRIES Inc. (United States)
Chas Archie, Nova Measuring Instruments Inc. (United States)

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