Share Email Print
cover

Journal of Micro/Nanolithography, MEMS, and MOEMS

Exact and reliable overlay metrology in nanoscale semiconductor devices using an image processing method
Author(s): Jinkook Park; ChaeHo Shin; Minkook Kim; Junghwan Kim; JeongKyun Park; JungSoo Kim; ChungSam Jun; Yeny Yim; Janghee Lee
Format Member Price Non-Member Price
PDF $20.00 $25.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

As semiconductor processing becomes more complicated and pattern sizes shrink, the overlay metrology has become one of the most important issues in the semiconductor industry. Therefore, in order to obtain correct, reliable overlay values in semiconductor fabrication facilities (fab), quantization methods for the efficient management and implementation of a measurement algorithm are required, as well as an understanding of the target structures in the semiconductor device. We implemented correct, reliable overlay values in the pattern using the image processing method. The quantization method, through correlation analysis and a new algorithm for target structures, were able to improve the sensitivity to misalignment in the pattern and enable more stable and credible in-line measurement by decreasing the distribution of the residuals in overlay values. Since overlay values of the pattern in the fab were measured and managed more reliably and quickly, it is expected that our study will be able to contribute to the yield enhancement of semiconductor companies.

Paper Details

Date Published: 10 October 2014
PDF: 7 pages
J. Micro/Nanolith. 13(4) 041409 doi: 10.1117/1.JMM.13.4.041409
Published in: Journal of Micro/Nanolithography, MEMS, and MOEMS Volume 13, Issue 4
Show Author Affiliations
Jinkook Park, SAMSUNG Electronics Co., Ltd. (Korea, Republic of)
ChaeHo Shin, SAMSUNG Electronics Co., Ltd. (Korea, Republic of)
Minkook Kim, SAMSUNG Electronics Co., Ltd. (Korea, Republic of)
Junghwan Kim, SAMSUNG Electronics Co., Ltd. (Korea, Republic of)
JeongKyun Park, SAMSUNG Electronics Co., Ltd. (Korea, Republic of)
JungSoo Kim, SAMSUNG Electronics Co., Ltd. (Korea, Republic of)
ChungSam Jun, SAMSUNG Electronics Co., Ltd. (Korea, Republic of)
Yeny Yim, SAMSUNG Electronics Co., Ltd. (Korea, Republic of)
Janghee Lee, SAMSUNG Electronics Co., Ltd. (Korea, Republic of)


© SPIE. Terms of Use
Back to Top