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Journal of Micro/Nanolithography, MEMS, and MOEMS

Thermoplastic nanoimprint lithography of electroactive polymer poly(vinylidene fluoride-trifluoroethylene-chlorofluoroethylene) for micro/nanoscale sensors and actuators
Author(s): Leeya Engel; Slava Krylov; Yosi Shacham-Diamand
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Paper Abstract

Thermoplastic nanoimprint lithography has been used for the first time, to the best of our knowledge, as a method for transferring nanoscale patterns to electroactive polymer poly(vinylidene fluoride-trifluoroethylene-chlorofluoroethylene) [P(VDF-TrFE-CFE)]. PVDF, its copolymers, and terpolymers cannot be processed using conventional lithography techniques because of their solubility in most organic solvents and photoresist developers. In this work, line-shaped patterns with widths of 60 to 100 nm were formed in the thermoplastic polymer by thermal compression using a previously patterned and treated silicon (Si) stamp. Annealing of the polymer under compression in a nanoimprinter following imprint resulted in a 10-fold improvement in the surface roughness of the polymer relative to spin-coated layers of P(VDF-TrFE-CFE). Patterning of distinct polymer structures on Si substrates (without residual layer) was achieved for micron scale structures. The processes presented here comprise a basis for the integration of P(VDF-TrFE-CFE) as an active material in nanoscale sensors and actuators.

Paper Details

Date Published: 27 August 2014
PDF: 6 pages
J. Micro/Nanolith. 13(3) 033011 doi: 10.1117/1.JMM.13.3.033011
Published in: Journal of Micro/Nanolithography, MEMS, and MOEMS Volume 13, Issue 3
Show Author Affiliations
Leeya Engel, Tel Aviv Univ. (Israel)
Slava Krylov, Tel Aviv Univ. (Israel)
Yosi Shacham-Diamand, Tel Aviv Univ. (Israel)

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